7 / 24 Full Service Phone Support 
Call Direct  804-840-6965

E-mail Mark.Heims@rtprepair.com
No Charge  Phone or E-mail Support !!!!

Parts

AST Elektronik
Steag
Mattson

Call or e-mail for specific part availability and pricing.

​​We have parts available for all models.

             Parts include but are not limited to

RTPtec

Specializing in (RTP) Rapid Thermal Process   Support, Repair, Training, Installation and Parts

SHS10
SHS100
SHS1000
SHS2000
SHS2800
SHS2800E
SHS2900
SHS3000
HELIOS
LPA

Power Supplies
Circuit cards
Computer  cards
IPC computers
ILC computers
Hard Drives
Robot End Effectors
Quartzware
Slip Guard Rings
TC Wafers
Lamps
Equipe Robot Rebuild

Equipe Aligner Rebuild